Design of a minimum surface-effect three degree-of-freedom micromanipulator
نویسندگان
چکیده
Thispaper describesthe fundamental physicalmotivationsfor small-scaleminimum surface-effect design,and presents a three degree-of-freedom micromanipulator design that incorporates a minimum surface.effect approach. The primary focus of the design is the split-tube flexure, a unique small-scale revolute joint that exhibits a considerably larger range of motion and significantly better multi-axis revolute joint characteristics than a conventional flexure. The development of this joint enables the implementation of a smaU-scale spatiallyloaded revolute joint-based manipulator with wellbehaved kinematic characteristics and without the backlash and stick-slip behavior that would otherwise prevent precision control.
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